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Optical Engineering

Deposition optimization of W/C multilayer mirrors
Author(s): Alan F. Jankowski
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Paper Abstract

The reflectivity of grazing incidence W/C multilayer mirrors can be optimized by progressively refining structural features through sputter deposition parameter optimization. In addition to the configuration of system geometry, the deposition rate, substrate temperature, and working gas pressure significantly affect the multilayer structure morphology. Of these parameters, working gas pressure has an overwhelming effect. The energy and distribution of sputtered adatoms, directly influenced by the sputtering gas pressure, affects the reactivity at and the reconstruction of vapor deposited surfaces. The interface abruptness is therefore affected by working gas pressure. The reduction in interfacial atomic intermixing (hence roughness) generally follows with decreased working gas pressure. Correspondingly, the improved reflective efficiency becomes more noticeable as measured from short through long x-ray wavelengths. Structural and reflectivity improvements in the W/C multilayer mirror system, characterized qualitatively using cross-section electron microscopy and quantitatively using x-ray diffraction, will be correlated to an optimization of the sputter deposition parameter—working gas pressure.

Paper Details

Date Published: 1 August 1990
PDF: 5 pages
Opt. Eng. 29(8) doi: 10.1117/12.55683
Published in: Optical Engineering Volume 29, Issue 8
Show Author Affiliations
Alan F. Jankowski, Lawrence Livermore National Lab. (United States)

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