Optical EngineeringAdvances in multilayer x-ray/EUV optics: synthesis, performance, and instrumentation
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The field of multilayer optics for the x-ray, soft x-ray and extreme ultraviolet wavelengths is maturing at a rapid pace. There are more than forty groups worldwide actively working in this area. A large part of these efforts is directed to improving the quality of multilayer structures by developing a better understanding of the synthesis-structure-property relationship. Although the quality of multilayer structures may be substantially improved, there are now significant instrumental applications for these reflecting optics. In this paper the current status of this field is discussed.