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Optical Engineering

The Color-Box alignment vernier: a sensitive lithographic alignment vernier read at low magnification
Author(s): Peter A. Heimann
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Paper Details

Date Published: 1 July 1990
PDF: 9 pages
Opt. Eng. 29(7) doi: 10.1117/12.55649
Published in: Optical Engineering Volume 29, Issue 7
Show Author Affiliations
Peter A. Heimann, AT&T Bell Labs. (United States)

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