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Optical Engineering

Semitransparent soft x-ray multilayer mirrors
Author(s): Chantal G. Khan Malek; Jean Susini; A. Madouri; M. Ouahabi; Jean-Rene Rivoira; F. R. Ladan; Yves Lepetre; Robert J. Barchewitz
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Paper Abstract

We report on the conception, fabrication, and characterization of a multilayer beamsplitter for use at oblique incidence in the soft x-ray range. Thin film deposition, conventional patterning, and anisotropic etch techniques are used to produce the self-supporting silicon carbide carrier film. Large-area Mo/C multilayer beamsplitters (1 cm2) were fabricated. Experimental results on the reflection and transmission at 1.33 nm are presented and compared with theoretical calculations. The role of the supporting film and the flatness of the structure are addressed. Our process is compared with existing approaches from the literature.

Paper Details

Date Published: 1 June 1990
PDF: 6 pages
Opt. Eng. 29(6) doi: 10.1117/12.55634
Published in: Optical Engineering Volume 29, Issue 6
Show Author Affiliations
Chantal G. Khan Malek, CNET-CNRS (France)
Jean Susini, European Synchrotron Radiation Facility (France)
A. Madouri, Ctr. National de la Recherche Scientifique (France)
M. Ouahabi, Univ. Pierre et Marie Curie (France)
Jean-Rene Rivoira, Univ. d'Aix-Marseille III (France)
F. R. Ladan, Ctr. National de la Recherche Scientifique (France)
Yves Lepetre, Univ. d'Aix-Marseille III (France)
Robert J. Barchewitz, Univ. de Paris VI (France)

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