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Optical Engineering

Efficient f/1 binary-optics microlenses in fused silica designed using vector diffraction theory
Author(s): J. Michael Finlan; Kevin M. Flood; Richard J. Bojko
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Paper Abstract

The diffraction efficiencies of binary-optics lenses with low f/#'s deviate from predictions of scalar diffraction theory. To increase the diffraction efficiencies for low f/#'s, vector diffraction theory is necessary. In this paper, we describe the design and fabrication of a 30 x 50 array of f/1 binary-optics microlenses using direct-write electron-beam lithography and reactive-ion etching. The diameter of each lens is 160 μm, and the focal length is 165 μm. The center-to-center spacing between the lenses is 300 μm, and they are fabricated in fused silica. The measured diffraction efficiency for an elliptical Gaussian beam is 80% for lenses designed using vector diffraction theory and 63% for lenses designed using scalar diffraction theory.

Paper Details

Date Published: 1 December 1995
PDF: 5 pages
Opt. Eng. 34(12) doi: 10.1117/12.215664
Published in: Optical Engineering Volume 34, Issue 12
Show Author Affiliations
J. Michael Finlan, LSA, Inc. (United States)
Kevin M. Flood, LSA, Inc. (United States)
Richard J. Bojko, Cornell Univ. (United States)

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