Share Email Print

Optical Engineering

Continuous-relief fan-out elements with optimized fabrication tolerances
Author(s): Peter Ehbets; Markus Rossi; Hans Peter Herzig
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

The design of kinoform fan-out elements with high efficiency and reduced sensitivity to vertical profile scaling errors is presented. We start from a high-efficiency continuous-phase fan-out solution and optimize the position of the 0-2π transitions in the phase function, in order to achieve a high fabrication-error tolerance. The sensitivity of Fourier-transform and focusing fan-out elements to vertical etch-depth errors is analyzed. The limitations for the fabrication of such structures by laserbeam writing are discussed. In particular, the influence of the finite writing-spot diameter on the fan-out performance is investigated. Design rules for fan-out elements, which consider fabrication constraints, are derived. Experimental results are presented for cylindrical focusing fanout elements with small uniformity error (2%) and weak profile scaling dependence.

Paper Details

Date Published: 1 December 1995
PDF: 9 pages
Opt. Eng. 34(12) doi: 10.1117/12.215507
Published in: Optical Engineering Volume 34, Issue 12
Show Author Affiliations
Peter Ehbets, Univ. of Neuchatel (Switzerland)
Markus Rossi, Paul Scherrer Institute (Switzerland)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)

© SPIE. Terms of Use
Back to Top