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Optical Engineering

Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer
Author(s): Osami Sasaki; Yuuichi Takebayashi; Xiangzhao Wang; Takamasa Suzuki
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Paper Abstract

We propose a method of exact measurement of flat surface profiles in a phase-conjugate Fizeau interferometer. Aberration of lenses causes an undesirable phase distribution in the interference signal of the phase-conjugate Fizeau interferometer. To eliminate this phase distribution, we shift the object in two directions orthogonal to each other and we get difference values of the surface profile of the object. Additional displacements of the object surface involved in the shifts lead to some small errors in the difference values. We estimate an exact surface profile by solving the difference equations. Characteristics of the method are made clear through computer simulations and measurements of a 40-mm-diam flat mirror.

Paper Details

Date Published: 1 October 1995
PDF: 7 pages
Opt. Eng. 34(10) doi: 10.1117/12.210750
Published in: Optical Engineering Volume 34, Issue 10
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Yuuichi Takebayashi, Niigata Univ. (Japan)
Xiangzhao Wang, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

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