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Optical Engineering

Interferometers for calibration of length standards
Author(s): Antti Lassila; Erkki Ikonen; Kari Riski
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Paper Abstract

Automated interferometers designed for calibration of gauge blocks and line scales are described. The gauge-block calibrator is a scanning interferometer with a white-light source and 633-nm He-Ne laser. The line-scale interferometer also uses a dynamic measurement method with a microscope and a CCD camera as the graduation line detector. The interferometers mainly use the same electronic units and meters for the environmental parameters. The combined standard uncertainty (1σ) is 52 nm for the gauge-block interferometer and 72 nm for the line-scale interferometer for 1-m steel standards

Paper Details

Date Published: 1 September 1995
PDF: 4 pages
Opt. Eng. 34(9) doi: 10.1117/12.208094
Published in: Optical Engineering Volume 34, Issue 9
Show Author Affiliations
Antti Lassila, Helsinki Univ. of Technology (Finland)
Erkki Ikonen, Helsinki Univ. of Technology (Finland)
Kari Riski, Ctr. for Metrology and Accreditation (Finland)

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