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Optical Engineering

High-precision surface shape testing by means of an interferometric sensor
Author(s): Hans-Joerg Heimbeck; Karl-Edmund Elssner; Andreas Vogel
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Paper Abstract

Testing of surlace shapes by automatic interferometry is exact, fast, and comfortable, and therefore popular. It however suffers from drawbacks: the equipment is often quite voluminous and expensive, and the attainable accuracy is limited by the precision of the reference surface (relative testing). Using the phase-shift software of BIFO, which has been improved over the years, Fisba Optik AG recently developed a matchboxsized, cost-reduced interferometric surface shape sensor to overcome the first drawback. Furthermore, this sensor was combined with methods for absolute calibration to solve the reference-surface problem.

Paper Details

Date Published: 1 September 1995
PDF: 5 pages
Opt. Eng. 34(9) doi: 10.1117/12.205674
Published in: Optical Engineering Volume 34, Issue 9
Show Author Affiliations
Hans-Joerg Heimbeck, Fisba Optik AG (Switzerland)
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Andreas Vogel, Berliner Institut fuer Optik GmbH (Germany)


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