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Optical Engineering

Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors
Author(s): In-Bok Kong; Seung-Woo Kim
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Paper Abstract

One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interlerograms without prior calibration. This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration.

Paper Details

Date Published: 1 May 1995
PDF: 5 pages
Opt. Eng. 34(5) doi: 10.1117/12.201667
Published in: Optical Engineering Volume 34, Issue 5
Show Author Affiliations
In-Bok Kong, Korea Advanced Institute of Science and Technology (South Korea)
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)

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