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Optical Engineering

Soft x-ray phase modulation multilayer dispersive element
Author(s): Lixiang Yuan; Zhengxiu Fan; Mingqi Cui; Shaojun Fu
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Paper Abstract

Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.

Paper Details

Date Published: 1 May 1995
PDF: 4 pages
Opt. Eng. 34(5) doi: 10.1117/12.201632
Published in: Optical Engineering Volume 34, Issue 5
Show Author Affiliations
Lixiang Yuan, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Mingqi Cui, Institute of High Energy Physics (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


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