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Optical Engineering

Precision holographic optical probe for displacement and surface measurements
Author(s): Bao Hua Zhuang; Zhen Li; Ji-Hua Zhang; Keqian Lu
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Paper Abstract

We describe a new precision displacement probe-the precision holographic optical probe (PHOP)-with the use of double holographic optical element (DHOE) technology. It is a novel noncontact method for the measurement and inspection of displacement and surface quality control. To improve the measurement resolution and linearity, the differential method for the PHOP is introduced. Infrared DHOEs are made by using a computer-generated hologram method. Mathematical models have been developed to analyze the performance of the probes. Computer simulations and experimental results have been obtained, showing sensitivity on the order of nanometers for these probes. The complexity and the size of the probes can be significantly reduced. They are both compact and inexpensive.

Paper Details

Date Published: 1 May 1995
PDF: 6 pages
Opt. Eng. 34(5) doi: 10.1117/12.199873
Published in: Optical Engineering Volume 34, Issue 5
Show Author Affiliations
Bao Hua Zhuang, Tianjin Univ. (China)
Zhen Li, Tianjin Univ. (China)
Ji-Hua Zhang, Tianjin Univ. (China)
Keqian Lu, Tianjin Univ. (China)


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