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Optical Engineering

Fabrication, characteristics, and performance of diamond mirrors for vacuum ultraviolet excimer lasers
Author(s): Kou Kurosawa; Ryoichi Sonouchi; Atsushi Yokotani; Wataru Sasaki; Masahito Kattoh; Yasuo Takigawa; Kazuhito Nishimura
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Paper Abstract

We have deposited crystalline diamond films on sintered Si3N4 substrates with a conventional hot-filament method and further finished the surfaces with a diamond lapping method. The diamond mirrors fabricated are proposed and demonstrated as among the most promising mirrors for vacuum ultraviolet rare-gas excimer lasers. We have obtained pulses with 15-mJ energy, 2.7-MW peak power, and 6-ns duration at 126 nm from an argon excimer laser, and with 70 mJ, 5.5 MW, and 5 ns at 146 nm from a krypton excimer laser without any surface damage. The latter values are the highest so far obtained.

Paper Details

Date Published: 1 May 1995
PDF: 5 pages
Opt. Eng. 34(5) doi: 10.1117/12.199864
Published in: Optical Engineering Volume 34, Issue 5
Show Author Affiliations
Kou Kurosawa, Univ. of Miyazaki (Japan)
Ryoichi Sonouchi, Univ. of Miyazaki (Japan)
Atsushi Yokotani, Univ. of Miyazaki (Japan)
Wataru Sasaki, Univ. of Miyazaki (Japan)
Masahito Kattoh, Kinki Univ. (Japan)
Yasuo Takigawa, Osaka Electro-Communication Univ. (Japan)
Kazuhito Nishimura, Osaka Diamond Industrial Co., Ltd. (Japan)


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