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Optical Engineering

Simple technique for out-of-focus feature alignment
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Paper Abstract

A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better.

Paper Details

Date Published: 1 February 1995
PDF: 3 pages
Opt. Eng. 34(2) doi: 10.1117/12.194047
Published in: Optical Engineering Volume 34, Issue 2
Show Author Affiliations
Jose M. Sasian, AT&T Bell Labs. (United States)
Douglas A. Baillie, Heriot-Watt Univ. (United Kingdom)


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