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Optical Engineering

Beamsplitter path equalization for white-light interferometry
Author(s): Marek Dobosz; Hirokazu Matsumoto; Shige Iwasaki
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Paper Abstract

In a two-beam, white-light, or polychromatic-Iight interferometer, any path-length difference in the beamsplitter introduces wavelength- dependent path delay because of the glass dispersion. A technique to align balanced path is described. The method is based on two- or three-wavelength simultaneous interferometry. Difference in intensity of fringes placed symmetrically around the zero interference order (ZIO) is used to measure and equalize the beamsplitter path (BP). As a polychromatic source of light. 660-, 840-, and 780-nm wavelength mixed beams of multimode laser diodes are applied. The technique allows us to balance the path difference with an accuracy better than ± 0.2 μm. Theoretical background and experimental verification of the method is presented.

Paper Details

Date Published: 1 February 1995
PDF: 6 pages
Opt. Eng. 34(2) doi: 10.1117/12.188618
Published in: Optical Engineering Volume 34, Issue 2
Show Author Affiliations
Marek Dobosz, Warsaw Univ. of Technology (Poland)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Shige Iwasaki, National Research Lab. of Metrology (Japan)


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