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Optical Engineering

Microfabricated optical chopper
Author(s): Michael T. Ching; Reid A. Brennen; Richard M. White
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Paper Abstract

A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electrostatically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable deflection amplitudes of 400 μm. Further optimizations of the design are discussed.

Paper Details

Date Published: 1 November 1994
PDF: 9 pages
Opt. Eng. 33(11) doi: 10.1117/12.181576
Published in: Optical Engineering Volume 33, Issue 11
Show Author Affiliations
Michael T. Ching, Berkeley Sensor & Actuator Ctr. (United States)
Reid A. Brennen, Univ. of California/Berkeley (United States)
Richard M. White, Univ. of California/Berkeley (United States)


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