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Optical Engineering

Preshaping photoresist for refractive microlens fabrication
Author(s): Theresa Rubico Jay; Margaret B. Stern
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Paper Abstract

Refractive microlenses are fabricated by the preshaped photoresist refractive optics by melting (P2ROM) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200-μm-diam microlenses with speeds between f/1.5 and f/5. Interferometric surlace measurements, used to determine the optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by the P2ROM method.

Paper Details

Date Published: 1 November 1994
PDF: 4 pages
Opt. Eng. 33(11) doi: 10.1117/12.179887
Published in: Optical Engineering Volume 33, Issue 11
Show Author Affiliations
Theresa Rubico Jay, Minuteman Regional Vocational Technology School (United States)
Margaret B. Stern, Massachusetts Institute of Technology (United States)

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