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Optical Engineering

Binary and multilevel diffractive lenses with submicrometer feature sizes
Author(s): Helmut Zarschizky; Albert Stemmer; Franz Mayerhofer; Guy Lefranc; Wolfgang Gramann
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Paper Abstract

Binary and multilevel diffractive lenses with submicrometer feature sizes are realized on silicon and galliumphosphide wafers using CAD methods, direct write e-beam lithography, reactive ion etching, antireflection coating, and wafer dicing. Measurements prove aberration-free imaging and maximum diftraction efficiencies of 70% for lenses with high numerical aperture (NA) of 0.5. Comparisons to other miniature and micro-optical elements are carried out with respect to laser-to-single-mode-fiber coupling and show the competitive performance of the diffractive lenses. Arrays for 18-channel parallel receiver modules are fabricated in on-axis and off-axis versions. Optical crosstalk is estimated.

Paper Details

Date Published: 1 November 1994
PDF: 10 pages
Opt. Eng. 33(11) doi: 10.1117/12.179886
Published in: Optical Engineering Volume 33, Issue 11
Show Author Affiliations
Helmut Zarschizky, Siemens AG (Germany)
Albert Stemmer, Siemens AG (Germany)
Franz Mayerhofer, Siemens AG (Germany)
Guy Lefranc, Siemens AG (Germany)
Wolfgang Gramann, Siemens AG (Germany)

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