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Optical Engineering

Dry etching for coherent refractive microlens arrays
Author(s): Margaret B. Stern; Theresa Rubico Jay
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Paper Abstract

Coherent arrays of refractive micro-optics are fabricated in the surface of silicon using a combination of lithographic and reactive-ion etching (RIE) techniques. The aspheric profile can be approximated in a stepwise manner by iterative steps of photolithography and RIE (binary optics technology), by direct etching of a preshaped polymer microlens etch mask into the substrate, or by analog etching of a lens profile directly into the substrate through a pinhole mask.

Paper Details

Date Published: 1 November 1994
PDF: 5 pages
Opt. Eng. 33(11) doi: 10.1117/12.179880
Published in: Optical Engineering Volume 33, Issue 11
Show Author Affiliations
Margaret B. Stern, Massachusetts Institute of Technology (United States)
Theresa Rubico Jay, Minuteman Regional Vocational Technical School (United States)

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