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Optical Engineering

Characterizations of composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation
Author(s): Rung-Ywan Tsai; Mu-Yi Hua; Chaur-Tsang Wei; Fang Chung Ho
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Paper Abstract

Composite TiO2-MgF2 films are fabricated by reactive ion-assisted coevaporation. The optical, structural, mechanical, and chemical properties of these films are systematically studied. From the analysis of x-ray diffraction and spectrophotometer data the crystallographic phase compositions and the optical properties of the composite films are found to be controlled by the relative deposition rate of two evaporation sources. The refractive index and the microhardness of the composite films behave nonlinearly with respect to the composition of the films. When the molar fraction of TiO2 is higher than 40%, the hardness of the composite films exceeds that of pure TiO2 and glass substrate. The surface morphologies of all composite films are featureless and very smooth. It has been shown that composite TiO2-MgF2 films prepared by reactive ion-assisted coevaporation are very suitable for the design and fabrication of single-layer and multilayer antireflection coatings.

Paper Details

Date Published: 1 October 1994
PDF: 8 pages
Opt. Eng. 33(10) doi: 10.1117/12.179392
Published in: Optical Engineering Volume 33, Issue 10
Show Author Affiliations
Rung-Ywan Tsai, Industrial Technology Research Institute (Taiwan)
Mu-Yi Hua, National Tsing Hua Univ. (Taiwan)
Chaur-Tsang Wei, Industrial Technology Research Institute (Taiwan)
Fang Chung Ho, Industrial Technology Research Institute (Taiwan)


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