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Optical Engineering

Pulse-frequency-modulated high-frequency-carrier diffractive elements for pattern projection
Author(s): Eero T. Tervonen; Jari Pekka Turunen; Jukka Pekola
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Paper Abstract

An efficient two-stage algorithm is presented for the synthesis of high-frequency-carrier diffractive elements. First, an on-axis phase-only stripe-geometry element with an unconstrained profile along each stripe is designed by an iterative Fourier transform algorithm. In the second stage, a steep linear phase term is added, and the profile is hard-clipped along each stripe. The result is a binary, pulse-frequency-modulated element suitable, e.g. , for a resonance-domain realization, which permits the elimination of the twin image. Experimental results are provided by direct-write electron-beam lithography and optical lithography, using both fully and partially coherent illumination.

Paper Details

Date Published: 1 August 1994
PDF: 9 pages
Opt. Eng. 33(8) doi: 10.1117/12.176512
Published in: Optical Engineering Volume 33, Issue 8
Show Author Affiliations
Eero T. Tervonen, Helsinki Univ. Tech. (Finland)
Jari Pekka Turunen, Helsinki Univ. of Technology (Finland)
Jukka Pekola, Univ. of Jyvaskyla (Finland)


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