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Optical Engineering

Characterization of microlenses using a phase-shifting shearing interferometer
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Paper Abstract

A shearing interferometer is proposed for the characterization of microlenses. The optical configuration of the test system enables the measurement of the wave aberrations, the focal length, and the deviations of the lens surface from an ideal sphere. In addition, a quantitative evaluation method is given that enables the calculation of the wave aberrations (e.g., the phase function) from the shearing interferometer data.

Paper Details

Date Published: 1 August 1994
PDF: 7 pages
Opt. Eng. 33(8) doi: 10.1117/12.173567
Published in: Optical Engineering Volume 33, Issue 8
Show Author Affiliations
Horst Sickinger, Univ. Erlangen (Germany)
Oliver R. Falkenstoerfer, Univ. Erlangen-Nuremberg (Germany)
Norbert Lindlein, Univ. Erlangen-Nuernberg (Germany)
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)


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