Share Email Print
cover

Optical Engineering

Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
Author(s): Takamasa Suzuki; Osami Sasaki; Jinsaku Kaneda; Takeo Maruyama
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

A real-time 2-D surface profile measurement system is described. In this system, a laser diode and a 2-D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 x 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurement is ~14 nm, rms.

Paper Details

Date Published: 1 August 1994
PDF: 6 pages
Opt. Eng. 33(8) doi: 10.1117/12.173561
Published in: Optical Engineering Volume 33, Issue 8
Show Author Affiliations
Takamasa Suzuki, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Jinsaku Kaneda, Niigata Univ. (Japan)
Takeo Maruyama, Niigata Univ. (Japan)


© SPIE. Terms of Use
Back to Top