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Optical Engineering

Sensitivity enhancement of an electro-optic sensor for displacement measurement
Author(s): Lakhan Singh Tanwar; Baij Nath Gupta; S. C. Bansal
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Paper Abstract

Current high-technology precision engineering sensors with submicrometer and even nanometer resolutions have become a necessity. Among the various types of noncontact high-resolution sensors, noninterferometric electro-optical (EO) sensors have their built-in preferential features. Earlier, we developed a triangulation principle based noncontact EO sensor with 0.01-μm resolution. By optimizing the design parameters of this EO sensor, the resolution has been enhanced by almost an order of magnitude. A piezoelectric transducer (PZT) mirror with 3 μm/kV excitation voltage has been used as the target surface. The details of experimental setup and the results arrived at are presented.

Paper Details

Date Published: 1 June 1994
PDF: 3 pages
Opt. Eng. 33(6) doi: 10.1117/12.168252
Published in: Optical Engineering Volume 33, Issue 6
Show Author Affiliations
Lakhan Singh Tanwar, National Physical Lab. (India)
Baij Nath Gupta, Indian Institute of Technology (India)
S. C. Bansal, Indian Institute of Technology (India)

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