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Optical Engineering

Interferometric determination of thickness of free-standing submicron Formvar films
Author(s): R. P. Shukla; Avijit Chowdhury; Parshotam Dass Gupta
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Paper Abstract

A method for measuring the thickness of free-standing films of Formvar in the range of 2000 Å to 5 μm is presented. The optical path difference of the film with reference to air is measured using a modified Jamin interferometer, and the refractive index is determined by a thin wedge technique. The method provides thickness measurements with an accuracy of ±300 Å. The results are found to be in good agreement with those obtained from a profilometer. This simple method can be very useful for thickness measurement of free-standing thin plastic films for extreme ultraviolet (XUV) soft x-ray research applications.

Paper Details

Date Published: 1 June 1994
PDF: 4 pages
Opt. Eng. 33(6) doi: 10.1117/12.167177
Published in: Optical Engineering Volume 33, Issue 6
Show Author Affiliations
R. P. Shukla, Bhabha Atomic Research Ctr. (India)
Avijit Chowdhury, Ctr. for Advanced Technology (India)
Parshotam Dass Gupta, Ctr. for Advanced Technology (India)


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