Share Email Print

Optical Engineering

Application of diamond-like carbon film as protection and antireflection coatings of ZnS elements
Author(s): Guifeng Zhang; L. J. Guo; Zhengtang Liu; Xiulin Zheng
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In the present study, the rf plasma chemical vapor deposition technique is applied to directly deposit a diamond-like carbon (DLC) film onto a zinc sulfide (ZnS) substrate with excellent adhesion. Great attention is paid to the investigation of the correlation between the deposition process parameters and the structure and properties of DLC film, and of the optical spectrum characteristic of DLC films appropriate to protect IR window materials. The experimental results show that the refractive index, microhardness, and growth rate of DLC films increase with increasing dc bias voltage. The IR transmittance of the ZnS substrate with DLC film has been increased to some extent between 3 and 12 μm.

Paper Details

Date Published: 1 April 1994
PDF: 4 pages
Opt. Eng. 33(4) doi: 10.1117/12.163158
Published in: Optical Engineering Volume 33, Issue 4
Show Author Affiliations
Guifeng Zhang, Northwestern Polytechnical Univ. (China)
L. J. Guo, Northwestern Polytechnical Univ. (China)
Zhengtang Liu, Northwestern Polytechnical Univ. (China)
Xiulin Zheng, Northwestern Polytechnical Univ. (China)

© SPIE. Terms of Use
Back to Top