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Optical Engineering

Light-scattering method for characterizing optical surfaces
Author(s): Haiming Wang
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Paper Abstract

A novel method is developed to study the relation between scatterometer scattering and surface scattering, which shows that they can be expressed by an equivalent image formation process with the convolution law. Based on the physical concepts, a scatterometer is constructed and a polished silicon wafer is measured. The power spectrum density function and the autocorrelation function of the surface roughness are calculated from the measured data by the application of the theoretical analysis.

Paper Details

Date Published: 1 November 1993
PDF: 7 pages
Opt. Eng. 32(11) doi: 10.1117/12.147718
Published in: Optical Engineering Volume 32, Issue 11
Show Author Affiliations
Haiming Wang, Centro de Investigaciones en Optica, AC (United States)


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