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Optical Engineering

Laser-induced damage in pellicles at 193 nm
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Paper Abstract

The effect of 193-nm excimer laser radiation on pellicles designed for 248-nm use is studied. The pellicles are transparent at 193 nm as well. However, prolonged irradiation causes gradual thinning and eventual rupture of the pellicle. The rate of change depends on the fluence and on the total dose but is not affected by the presence of atmospheric oxygen. Two-photon absorption plays an important role in the interaction between the laser and the pellicle material. Extrapolation to the approximately 0.1 mJ cm2/pulse fluences expected to be used in 193-nm steppers indicates that these pellicles will change little for several years in a full-production environment.

Paper Details

Date Published: 1 October 1993
PDF: 9 pages
Opt. Eng. 32(10) doi: 10.1117/12.146857
Published in: Optical Engineering Volume 32, Issue 10
Show Author Affiliations
Mordechai Rothschild, Massachusetts Institute of Technology (United States)
Jan H. C. Sedlacek, Massachusetts Institute of Technology (United States)

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