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Optical Engineering

Laser-induced damage in pellicles at 193 nm
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Paper Abstract

he effect of 1 93-nm excimer laser radiation on pellicles designed for 248-nm use is studied. The pellicles are transparent at 1 93 nm as well. However, prolonged irradiation causes gradual thinning and eventual rupture of the pellicle. The rate of change depends on the fluence and on the total dose but is not affected by the presence of atmospheric oxygen. Two-photon absorption plays an important role in the interaction between the laser and the pellicle material. Extrapolation to the approximately 0.1 mJ cm2lpulse fluences expected to be used in 1 93-nm steppers indicates that these pellicles will change little for 5everal years in a full-production environment.

Paper Details

Date Published: 1 October 1993
Opt. Eng. 32(10) doi: 10.1117/12.146852
Published in: Optical Engineering Volume 32, Issue 10
Show Author Affiliations
Mordechai Rothschild, MIT Lincoln Lab. (United States)
Jan H. C. Sedlacek, MIT Lincoln Lab. (United States)

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