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Optical Engineering

Proposed data acquisition technique for heterodyne interferometers
Author(s): Peter Gaal; Peter Jani; Aladar Czitrovszky
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Paper Abstract

The development of a data acquisition system for a high resolution motion analyzer is discussed. The displacement measurement is based on a Michelson-type heterodyne interlerometer. The gained detector signals of the interferometer are processed by the direct phase comparison method. This method makes it possible to achieve a resolution equivalent of 1/512 of the applied optical wavelength, without the intricate signal conditioning needed by the commonly used phase-locked loop frequency multiplication or analog signal multiplication methods. The main technical data of the system are 1.25-nm resolution, 20-m measuring distance, and 60-kHz sample rate. The accuracy is better than ± 10 nm ± 0.1 ppm within a velocity range of ± 1.8 m/s and an acceleration range of ± 9900 m/s2.

Paper Details

Date Published: 1 October 1993
PDF: 4 pages
Opt. Eng. 32(10) doi: 10.1117/12.145359
Published in: Optical Engineering Volume 32, Issue 10
Show Author Affiliations
Peter Gaal, Central Research Institute for Physics (Hungary)
Peter Jani, Central Research Inst. for Physics (Hungary)
Aladar Czitrovszky, Central Research Institute for Physics (Hungary)


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