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Optical Engineering

Polarizing reflection grating beamsplitter for the 10.6-μm wavelength
Author(s): Helmut Haidner; Peter Kipfer; John T. Sheridan; Johannes Schwider; Norbert Streibl; Juergen Lindolf; Martin Collischon; Anette Lang; Joachim Hutfless
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Paper Abstract

A polarizing grating beamsplitter working in reflection at the 10.6-μm wavelength is presented. The grating was designed using rigorous diffraction theory. The incident TM-polarized light is not diffracted but reflected as the zero order, and the TE-polarized light is mainly diffracted into the + 1 and - 1 diffraction orders. The grating is a surface relief with a metal coating. It consists of V-grooves and is fabricated in silicon using photolithography and a combination of dry and wet chemical etching. The measured diffraction efficiencies agree with the theoretical predictions. The sum of the measured diffraction efficiencies of the + 1 and the - 1 orders is 90% for TE polarization and 6% for TM polarization. If the grating is in a conical mount, it can be used as a beam attenuator or a three-way beamsplitter.

Paper Details

Date Published: 1 August 1993
PDF: 6 pages
Opt. Eng. 32(8) doi: 10.1117/12.143341
Published in: Optical Engineering Volume 32, Issue 8
Show Author Affiliations
Helmut Haidner, Univ. Erlangen-Nuernberg (Germany)
Peter Kipfer, Univ. Erlangen-Nuernberg (Germany)
John T. Sheridan, Univ. Erlangen-Nuernberg (Germany)
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)
Norbert Streibl, Univ. Erlangen-Nuernberg (Germany)
Juergen Lindolf, Univ. Erlangen-Nuernberg (Germany)
Martin Collischon, Univ. Erlangen-Nuernberg (Germany)
Anette Lang, Univ. Erlangen-Nuernberg (Germany)
Joachim Hutfless, Univ. Erlangen Nuernberg (Germany)

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