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Optical Engineering

New compensating four-phase algorithm for phase-shift interferometry
Author(s): Johannes Schwider; Oliver R. Falkenstoerfer; Horst Schreiber; Andreas Zoeller; Norbert Streibl
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Paper Abstract

Phase-shift interferometry suffers from periodic systematic errors caused by erroneous reference phase adjustments and instabilities of the interferometer. A new method is described that uses only four interferograms and eliminates the errors caused by linear adjustment deviations of the reference phase or the mean phase in the interferometer. Test results confirm the theoretical predictions.

Paper Details

Date Published: 1 August 1993
PDF: 3 pages
Opt. Eng. 32(8) doi: 10.1117/12.143340
Published in: Optical Engineering Volume 32, Issue 8
Show Author Affiliations
Johannes Schwider, Univ. Erlangen-Nuernberg (Germany)
Oliver R. Falkenstoerfer, Univ. Erlangen-Nuernberg (Germany)
Horst Schreiber, Univ. Erlangen-Nuernberg (Germany)
Andreas Zoeller, Univ. Erlangen-Nuernberg (Germany)
Norbert Streibl, Univ. Erlangen-Nuernberg (Germany)


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