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Optical Engineering

Monitoring surface roughness by means of doubly scattered image speckle
Author(s): Takeaki Yoshimura; Eiichi Miyazaki; Kunifumi Nakanishi
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Paper Abstract

A new method to measure the surface roughness under fully developed speckle pattern illumination is proposed. This technique was developed on the basis that the roughness depends on the speckle size of doubly scattered light and that the speckle size can be determined from the second-order moment of integrated intensity over a finite area of the photodetector used. This system can determine the longitudinal roughness or the average slope of the surface profile on-line, and determine the spatial distribution of the roughness without a mechanical scanning system.

Paper Details

Date Published: 1 June 1993
PDF: 6 pages
Opt. Eng. 32(6) doi: 10.1117/12.135846
Published in: Optical Engineering Volume 32, Issue 6
Show Author Affiliations
Takeaki Yoshimura, Kobe Univ. (Japan)
Eiichi Miyazaki, Kobe Univ. (Japan)
Kunifumi Nakanishi, Kobe Univ. (Japan)


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