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Optical Engineering

Optical interference filters with continuous refractive index modulations by microwave plasma-assisted chemical vapor deposition
Author(s): Adrian C. Greenham; Bruce A. Nichols; Roger M. Wood; Noorallah Nourshargh; Keith L. Lewis
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Paper Abstract

Optical interference filters that have continuously modulated refractive indices throughout their thicknesses (rugates) are designed and fabricated using a microwave plasma-assisted chemical vapor deposition technique. Examples are shown of single- and double-response narrowband reflection filters made from variable composition silicon oxynitride deposited on silica. Reflectivities in excess of 99.9% have been realized with bandwidths in the 2 to 10% range.

Paper Details

Date Published: 1 May 1993
PDF: 7 pages
Opt. Eng. 32(5) doi: 10.1117/12.130253
Published in: Optical Engineering Volume 32, Issue 5
Show Author Affiliations
Adrian C. Greenham, GEC-Marconi Hirst Research Ctr. (United Kingdom)
Bruce A. Nichols, GEC-Marconi Ltd. (United Kingdom)
Roger M. Wood, GEC-Marconi Ltd. (United Kingdom)
Noorallah Nourshargh, GEC-Marconi Ltd. (United Kingdom)
Keith L. Lewis, Defence Research Agency (United Kingdom)

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