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Measurement of microsurface topography using a self-mixing optical configuration
Author(s): Xiaohong Sun; Han Wang; Bin Liu; Yanguang Yu
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Paper Abstract

This work proposes to measure the topography of microstructure surfaces using a self-mixing interference (SMI) configuration. The theoretical measurement model is built using beam-expanded plane wave method and considering SMI effect. The interference patterns for different objects are obtained based on the presented model. In addition, an algorithm for reconstructing the three-dimensional surface is implemented and applied onto an object with spherical surface. The presented work shows the potential application for topography measurement using a compact SMI configuration.

Paper Details

Date Published: 8 February 2018
PDF: 6 pages
Opt. Eng. 57(5) 051503 doi: 10.1117/1.OE.57.5.051503
Published in: Optical Engineering Volume 57, Issue 5
Show Author Affiliations
Xiaohong Sun, Univ of Wollongong (Australia)
Zhengzhou Univ. (China)
Han Wang, Univ. of Wollongong (Australia)
Bin Liu, Univ. of Wollongong (Australia)
Yanguang Yu, Univ. of Wollongong (Australia)

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