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Optical Engineering

Optical lithography of three-dimensional magnetophotonic microdevices
Author(s): Dam Thuy Trang Nguyen; Olivia Del Guercio; Thi Huong Au; Duc Thien Trinh; Nguyen Phuong Thao Mai; Ngoc Diep Lai
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Paper Abstract

We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.

Paper Details

Date Published: 1 March 2018
PDF: 5 pages
Opt. Eng. 57(4) 041406 doi: 10.1117/1.OE.57.4.041406
Published in: Optical Engineering Volume 57, Issue 4
Show Author Affiliations
Dam Thuy Trang Nguyen, École normale supérieure Paris-Saclay (France)
Olivia Del Guercio, École normale supérieure Paris-Saclay (France)
Thi Huong Au, École normale supérieure Paris-Saclay (France)
Duc Thien Trinh, École normale supérieure Paris-Saclay (Vietnam)
Nguyen Phuong Thao Mai, École normale supérieure Paris-Saclay (France)
Ngoc Diep Lai, École normale supérieure Paris-Saclay (France)


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