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Optical Engineering • new

Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application
Author(s): Hilmi Artun Oyman; Yigit Daghan Gökdel; Onur Ferhanoglu; Arda Deniz Yalcinkaya
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Paper Abstract

A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 × 10 6 cycle. The scanning device is designed to meet a confocal microscopy application providing 100    μ m × 100    μ m field of view and < 3 - μ m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution.

Paper Details

Date Published: 5 February 2018
PDF: 7 pages
Opt. Eng. 57(4) 041405 doi: 10.1117/1.OE.57.4.041405
Published in: Optical Engineering Volume 57, Issue 4
Show Author Affiliations
Hilmi Artun Oyman, Bogaziçi Üniv. (Turkey)
Istanbul Bilgi Üniv. (Turkey)
Yigit Daghan Gökdel, Istanbul Bilgi Üniv. (Turkey)
Onur Ferhanoglu, Istanbul Technical Univ. (Turkey)
Arda Deniz Yalcinkaya, Bogaziçi Üniv. (Turkey)


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