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Optical Engineering

Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe
Author(s): Ling Xiong; Xiao Luo; Hai-xiang Hu; Zhi-yu Zhang; Feng Zhang; Li-gong Zheng; Xue-jun Zhang
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Paper Abstract

A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure large optics during the ground stage. A method has been developed for improving the measurement accuracy of SAP using a capacitive probe and implementing calibrations. The experimental result compared with the interferometer test shows the accuracy of 0.068    μ m in root-mean-square (RMS) and maps in 37 low-order Zernike terms show accuracy of 0.048    μ m RMS, which shows a powerful capability to provide a major input in high-precision grinding.

Paper Details

Date Published: 4 August 2017
PDF: 7 pages
Opt. Eng. 56(8) 084101 doi: 10.1117/1.OE.56.8.084101
Published in: Optical Engineering Volume 56, Issue 8
Show Author Affiliations
Ling Xiong, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Xiao Luo, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hai-xiang Hu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Univ. of Chinese Academy of Sciences (China)
Zhi-yu Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Feng Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Li-gong Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xue-jun Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


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