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Optical Engineering

Infrared properties of sol–gel derived zirconia film
Author(s): Itsunari Yamada; Hiroki Torii; Yoshiro Ishihara
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Paper Abstract

We examined infrared transmission characteristics of a sol–gel derived zirconia film and the antireflective (AR) effect of this film for an Si substrate in the midinfrared region. The surface reflection loss of an Si plate is high (∼30%) because of the high refractive index (3.42) in the infrared region. We employed zirconia nanoparticle dispersion with 15 wt. % (1-butanol solvent) as starting sol solution. Then, the dispersion was coated with Si substrate at a spin-coating speed of 2000 rpm, and the substrate was heated to 150°C. The number of coatings was repeated seven times. As a result, the transmittance at 5.6-μm wavelength was enhanced to 66.2%, and we found that the coated film worked efficiently as the AR film up to 10-μm wavelength. Additionally, by heating the substrate to 800°C, the large absorptions at 2.9-, 6.4-, and 6.9-μm wavelengths could be suppressed because the hydroxy group in the film was reduced. Its peak transmittance was 67.9% at 4.9-μm wavelength.

Paper Details

Date Published: 12 July 2017
PDF: 5 pages
Opt. Eng. 56(7) 077104 doi: 10.1117/1.OE.56.7.077104
Published in: Optical Engineering Volume 56, Issue 7
Show Author Affiliations
Itsunari Yamada, Univ. of Shiga Prefecture (Japan)
Hiroki Torii, Univ. of Shiga Prefecture (Japan)
Yoshiro Ishihara, Univ. of Shiga Prefecture (Japan)


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