Share Email Print
cover

Optical Engineering

LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations.

Paper Details

Date Published: 15 March 2017
PDF: 5 pages
Opt. Eng. 56(3) 037106 doi: 10.1117/1.OE.56.3.037106
Published in: Optical Engineering Volume 56, Issue 3
Show Author Affiliations
Muhammet Poyraz, Stanford Univ. (United States)
Bilkent Univ. (Turkey)
Kazim Gorgulu, Bilkent Univ. (Turkey)
Zulkarneyn Sisman, Bilkent Univ. (Turkey)
Mahmud Yusuf Tanrikulu, Adana Science and Technology Univ. (Turkey)
Ali Kemal Okyay, Bilkent Univ. (Turkey)


© SPIE. Terms of Use
Back to Top