Share Email Print
cover

Optical Engineering • Open Access

How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high-reflection coatings
Author(s): Ella S. Field; John C. Bellum; Damon E. Kletecka

Paper Abstract

Optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low-base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we explored how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. The coatings of this study consist of HfO2 and SiO2 layer materials and include antireflection coatings for 527 nm at normal incidence and high-reflection coatings for 527 nm at 45-deg angle of incidence in P-polarization.

Paper Details

Date Published: 15 July 2016
PDF: 5 pages
Opt. Eng. 56(1) 011005 doi: 10.1117/1.OE.56.1.011005
Published in: Optical Engineering Volume 56, Issue 1
Show Author Affiliations
Ella S. Field, Sandia National Labs. (United States)
John C. Bellum, Sandia National Labs. (United States)
Damon E. Kletecka, Sandia National Labs. (United States)


© SPIE. Terms of Use
Back to Top