Share Email Print
cover

Optical Engineering

Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

The optical constants of titanium dioxide (TiO2) have been experimentally determined at energies in the extreme ultraviolet and soft x-ray spectral regions, from 25.5 to 612 eV. Measuring angle-dependent reflectance of amorphous TiO2 thin films with synchrotron radiation at the BEAR beamline of Synchrotron ELETTRA. The experimental reflectivity profiles were fitted to the Fresnel equations using a genetic algorithm applied to a least-square curve fitting method, obtaining values for δ and β. We compared our measurements with tabulated data. All samples were grown on Si (100) substrates by the electron-beam evaporation technique, with a substrate temperature of 150°C and deposition rates of 0.3 to 0.5  /s. Complete films characterization have been carried out with structural (XRD, ellipsometry, and profilometry), compositional (x-ray photoelectron spectroscopy), and morphological (atomic force microscopy) analyses.

Paper Details

Date Published: 14 September 2016
PDF: 8 pages
Opt. Eng. 55(9) 095102 doi: 10.1117/1.OE.55.9.095102
Published in: Optical Engineering Volume 55, Issue 9
Show Author Affiliations
Antonela Comisso, Univ. degli Studi di Padova (Italy)
Consiglio Nazionale delle Ricerche (Italy)
Marco Nardello, Univ. degli Studi di Padova (Italy)
Consiglio Nazionale delle Ricerche (Italy)
Angelo Giglia, Istituto Officina Materiali-CNR (Italy)
Lab. Nazionale TASC (Italy)
Piergiorgio Nicolosi, Univ. degli Studi di Padova (Italy)
Consiglio Nazionale delle Ricerche (Italy)


© SPIE. Terms of Use
Back to Top