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Optical Engineering • Open Access

Double-meander spring silicon piezoresistive sensors as microforce calibration standards
Author(s): Gerry Hamdana; Hutomo Suryo Wasisto; Lutz Doering ; Chunlei Yan; Lei Zhou; Uwe Brand; Erwin Peiner

Paper Abstract

A transferable force calibration standard based on a silicon microelectromechanical sensor has been designed, fabricated, and characterized for micrometrology applications. Two essential elements of double-meander springs and full piezoresistive etched

Paper Details

Date Published: 27 May 2016
PDF: 12 pages
Opt. Eng. 55(9) 091409 doi: 10.1117/1.OE.55.9.091409
Published in: Optical Engineering Volume 55, Issue 9
Show Author Affiliations
Gerry Hamdana, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (LENA) (Germany)
Hutomo Suryo Wasisto, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (LENA) (Germany)
Lutz Doering , Physikalisch-Technische Bundesanstalt (Germany)
Chunlei Yan, Technische Univ. Braunschweig (Germany)
Lei Zhou, Technische Univ. Braunschweig (Germany)
Uwe Brand, Physikalisch-Technische Bundesanstalt (Germany)
Erwin Peiner, Technische Univ. Braunschweig (Germany)
Lab. for Emerging Nanometrology (LENA) (Germany)


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