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Optical Engineering • new

Optimal design of the laser synthetic wavelength interferometer
Author(s): Liping Yan; Benyong Chen
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Paper Abstract

From the actual implementation of displacement measurement in the laser synthetic wavelength interferometer, a nonlinear error analysis model was proposed by detecting the simultaneous zero-crossing position errors of two interference signals. By using this model, periodic nonlinear errors resulting from the polarizing leakage induced by the imperfection or misalignment of the polarizing beamsplitter in the basic configuration of the interferometer were analyzed. In order to reduce periodic nonlinear errors, two optimized optical configurations of the interferometer were presented. The simulations and experiments for verifying the performance of three configurations of the interferometer were performed. The experimental results demonstrate that the optimized third configuration has good stability, with a standard deviation of about 0.7 nm.

Paper Details

Date Published: 2 March 2016
PDF: 7 pages
Opt. Eng. 55(9) 091401 doi: 10.1117/1.OE.55.9.091401
Published in: Optical Engineering Volume 55, Issue 9
Show Author Affiliations
Liping Yan, Zhejiang Sci-Tech Univ. (China)
Benyong Chen, Zhejiang Institute of Science and Technology (China)


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