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Optical Engineering

Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator
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Paper Abstract

Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue of optical isolation of slot waveguides. This article, in an effort to bridge the gap in the available literature, focuses on the aspect of optical isolation of slot waveguides and provides definitive rules for application of different slot waveguides in dense integration of optical links. A slot waveguide with a 48-nm-wide slot was fabricated with electron beam lithography and inductively coupled plasma etching.

Paper Details

Date Published: 9 August 2016
PDF: 4 pages
Opt. Eng. 55(8) 087102 doi: 10.1117/1.OE.55.8.087102
Published in: Optical Engineering Volume 55, Issue 8
Show Author Affiliations
Zengzhi Huang, Huazhong Univ. of Science and Technology (China)
Jinsong Xia, Huazhong Univ. of Science and Technology (China)


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