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Optical Engineering • Open Access

Interference microscope objectives for wide-field areal surface topography measurements
Author(s): Peter J. de Groot; James F. Biegen

Paper Abstract

We propose a type of interference objective that extends the range of application for flexible microscope platforms to larger fields of view. The objective comprises a beamsplitter plate and a partially transparent reference mirror arranged coaxially with the objective lens system. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spatially extended white-light illumination. Examples include a turret-mountable 1.4× magnification objective parfocal with high-magnification objectives up to 100× and a dovetail mount 0.5× objective with a 34×34  mm field. This design is a practical alternative to the classical Michelson and Mirau type objectives for low magnifications.

Paper Details

Date Published: 22 July 2016
PDF: 6 pages
Opt. Eng. 55(7) 074110 doi: 10.1117/1.OE.55.7.074110
Published in: Optical Engineering Volume 55, Issue 7
Show Author Affiliations
Peter J. de Groot, Zygo Corporation (United States)
James F. Biegen, Zygo Corporation (United States)

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