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Optical Engineering

Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics
Author(s): Ling Xiong; Xiao Luo; Zhenyu Liu; Xiaokun Wang; Haixiang Hu; Feng Zhang; Ligong Zheng; Xuejun Zhang
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Paper Abstract

The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from power. In order to analyze the effect of misalignment errors, the relation between alignment parameters and test results of axisymmetric optics is presented. Analytical solutions of SAP system errors from tested mirror misalignment, arm length L deviation, tilt-angle θ deviation, air-table spin error, and air-table misalignment are derived, respectively; and misalignment tolerance is given to guide surface measurement. In addition, experiments on a 2-m diameter parabolic mirror are demonstrated to verify the model; according to the error budget, we achieve the SAP test for low-order errors except power with accuracy of 0.1 μm root-mean-square.

Paper Details

Date Published: 20 July 2016
PDF: 11 pages
Opt. Eng. 55(7) 074108 doi: 10.1117/1.OE.55.7.074108
Published in: Optical Engineering Volume 55, Issue 7
Show Author Affiliations
Ling Xiong, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Chinese Academy of Sciences (China)
Xiao Luo, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Zhenyu Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xiaokun Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Haixiang Hu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Chinese Academy of Sciences (China)
Feng Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Ligong Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xuejun Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)


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