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Optical Engineering

Phase recovery of high numerical-aperture spherical surfaces in tilt phase-shift interferometry
Author(s): Hagyong Kihm
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Paper Abstract

A phase-recovery method based on iterative least-square fitting is proposed to overcome off-axis phase-shifting errors of high numerical-aperture (NA) surfaces in tilt phase-shift interferometry. Vibration of test optics having optical powers makes nonuniform off-axis phase-shift errors over the aperture, which is severe when testing optics with high NA. The proposed method calculates the test wavefront, off-axis phase shift, and tilt phase shifts in x- and y-directions within four separate least-square fitting steps iteratively. Parabolic and linear regressions are used for extracting off-axis and tilt phase-shift errors, respectively. The proposed method is verified with simulations and experiments with a Fizeau interferometer having F/0.75 transmission sphere. This method can be used with a temporal phase-shifting interferometers for testing high-NA optics in the presence of vibration.

Paper Details

Date Published: 7 July 2016
PDF: 9 pages
Opt. Eng. 55(7) 074101 doi: 10.1117/1.OE.55.7.074101
Published in: Optical Engineering Volume 55, Issue 7
Show Author Affiliations
Hagyong Kihm, Korea Research Institute of Standards and Science (Republic of Korea)


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