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Optical Engineering

Dynamic specular surface measurement based on color-encoded fringe reflection technique
Author(s): Yuxiang Wu; Huimin Yue; Jingya Yi; Mingyang Li; Yong Liu
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Paper Abstract

A color-encoded fringe reflection technique is presented for dynamic specular surface measurement. Only one color-encoded fringe pattern is required in this method. In comparison with the reported dynamic specular surface measuring method (the composite fringe pattern method), the proposed color-encoded fringe technique has higher phase accuracy. The color intensity crosstalk problem between the three channels is discussed. As a result, this problem will seldom affect the phase accuracy of the proposed method. This turns out to be the main reason why the presented method can achieve a higher measuring accuracy than the existing dynamic measurement method. In addition, the proposed color-encoded fringe technique is proven to be more suitable than the existing method for the complex tested surface. The vibrating measuring experiment of a wafer proves the ability of the proposed method to achieve dynamic measurement.

Paper Details

Date Published: 26 February 2016
PDF: 7 pages
Opt. Eng. 55(2) 024104 doi: 10.1117/1.OE.55.2.024104
Published in: Optical Engineering Volume 55, Issue 2
Show Author Affiliations
Yuxiang Wu, Univ. of Electronic Science and Technology of China (China)
Huimin Yue, Univ. of Electronic Science and Technology of China (China)
Jingya Yi, Univ. of Electronic Science and Technology of China (China)
Mingyang Li, Univ. of Electronic Science and Technology of China (China)
Yong Liu, Univ. of Electronic Science and Technology of China (China)


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