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Optical Engineering • Open Access

Aberration properties of odd-order surfaces in optical design

Paper Abstract

We theoretically represent the effectiveness of the odd-order surface for optical designs via an aberration theory. The theory employs an expression of the odd-order surface with aberration coefficients, which are derived by power-series expansion of wavefront aberration with respect to the coordinates of optical surfaces. This expression allows us to understand the aberration characteristics of odd-order surfaces. By applying this aberration theory to the design of extreme ultraviolet lithography optics, we show that odd-order surfaces are effective in reducing higher-order aberrations with fewer coefficients than even-order surfaces do.

Paper Details

Date Published: 28 December 2016
PDF: 11 pages
Opt. Eng. 55(12) 125107 doi: 10.1117/1.OE.55.12.125107
Published in: Optical Engineering Volume 55, Issue 12
Show Author Affiliations
Takao Tanabe, Tokyo Polytechnic Univ. (Japan)
Hakuto Corp. (Japan)
Masato Shibuya, Tokyo Polytechnic Univ. (Japan)

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